Phase Stability and Defect Structure of (TiZrHfNbV)N Nitride Coatings under Xe 14+ 200 MeV Ion Irradiation

A study of phase structure in (TiZrHfNbV)N coatings irradiated with 200 MeV high energy Xe14+ ions with different fluences was carried out. Although (TiZrHfNbV)N coatings were irradiated with high energy Xe+ ions with different fluences: $5 \times 1011(5\mathrm{E}11)$, $5 \times 1012(5\mathrm{E}12)$ and $5 \times 1013(5\mathrm{E}13)$ ions/cm2, no amorphous or intermetallic phase are detected.