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Hydrogenated diamond-like carbon film prepared by RF bias assisting magnetron sputtering
Hydrogenated diamond-like carbon film prepared by RF bias assisting magnetron sputtering
2019
Xuelei Ren
Hekang Zhu
Na Liu
Qiuping Wei
Jiaxuan Pu
Li Ma
Yijia Wang
Youneng Xie
Bingqiang Wei
Zhiming Yu
Kechao Zhou
Keywords:
Sputter deposition
Diamond-like carbon
Optoelectronics
Materials science
Thin film
Deposition (law)
Amorphous carbon
Microstructure
Correction
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