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Properties of IZTO Thin Film Prepared by the Hetero-Target Sputtering System
Properties of IZTO Thin Film Prepared by the Hetero-Target Sputtering System
2008
Dae-Hyun Kim
You Seung Rim
In Hwan Son
Kyung Hwan Kim
Keywords:
Thin film
Sputtering
Materials science
Composite material
Optoelectronics
Correction
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