Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization

While testing electrical properties in microsystems is a well-developed art, the testing of mechanical properties of MEMS devices is not. There is a great need for techniques that will allow the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical properties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer (MZI), monolithically integrated with the piezoelectric (PZT) actuated membrane.