Silicon (100)/SiO2 by ToF-SIMS

The authors report the time-of-flight secondary ion mass spectrometry of Si (100)/SiO2. Both positive and negative ion spectra were obtained using a cluster ion source (Bi3 2+ primary ions at 50 keV). Si+ is the base peak in positive ion mode. The negative ion spectrum shows signals characteristic of the native oxide: SiO2 −, SiO2H−, SiO3 −, and SiO3H−.