Depth Profile Analysis of New Materials in Hollow Cathode Discharge

In this review the possibility of hollow cathode discharge for depth profile analysis is demonstrated for several new materials: planar optical waveguides fabricated by Ag+‐Na+ ion exchange process in glasses, SnO2 thin films for gas sensors modified by hexamethildisilazane after rapid thermal annealing, W‐ and WC‐ CVD layers deposited on Co‐metalloceramics and WO3‐ CVD thin films deposited on glass. The results are compared with different standard techniques.