Test-bench calibration of the Double-Slit Ion Energy Analyzer for Heavy Ion Beam Probing Diagnostics

This work presents the results of the design study, investigations of the features and a calibration of double-slit ion energy analyzer prototype at the test-bench in IPP NSC KIPT, Kharkov, Ukraine, with beam energy up to 10 keV. Hitherto obtained accuracy for both analyzer slits is ΔG−2×10−3 and ΔF−3×10−3, which is limited by the existing step motor accuracy 0.1 mm for entrance slits moving. The presented study work is considered as the first step to the multi-slit analyzer elaboration.