A method and an apparatus for manufacturing a material film

In the manufacturing method of the endohedral by the background art, the inclusion atoms to empty fullerenes were irradiated with encapsulated ions ionized in a vacuum chamber. When forming the fullerenes containing the larger atoms than six-membered ring of fullerene, formation efficiency of the endohedral fullerene is low. Simultaneously with the irradiation of the enclosed ions were to be irradiated a large ion diameter and mass fullerene film. Since the mass is large ions collide with the fullerene molecule, the fullerene molecules are largely deformed, the opening of the fullerene molecules is increased. Containing ions enters the cage fullerene molecule, the probability of endohedral is formed becomes high.