Formation and Physicochemical Properties of High Entropy Oxide Based on Equiatomic Alloy CrFeCoNiMn

The physicomechanical and X-ray investigations of high entropy oxide coating obtained by the cathode sputtering of multicomponent alloy CrFeCoNiMn in plasma of compressed vacuum-arc gaseous discharge have been conducted. The hardness of high entropy oxide coating is shown to reach the level of 27 GPa at the elasticity modulus of 270 GPa, which decreases to 17 GPa after annealing at temperature 1100°C during 300 min in the open air. The friction coefficient of coating at small sliding velocities amounts to 0.045–0.132 depending on the coating hardness.