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Development of programmable solid state VARIAC for baking plasma vacuum chambers
Development of programmable solid state VARIAC for baking plasma vacuum chambers
2015
Bharat Arambhadiya
Hardik Sharma
Harshad Chauhan
Paresh Panchal
Samiran Mukharjee
Rachana Rajpal
Keywords:
Solid-state
Electric current
Plasma
Materials science
Optoelectronics
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