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Advanced In- and Out-off plane High Resolution X-ray Strain Analysis on MEMS
Advanced In- and Out-off plane High Resolution X-ray Strain Analysis on MEMS
2010
A. Dommann
A. Neels
Keywords:
Optoelectronics
X-ray
Microelectromechanical systems
Strain (chemistry)
Materials science
Optics
high resolution
Correction
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