Effect of substrate temperature on oblique-angle sputtered ZnO:Ga thin films

A study of the effect of substrate temperature on oblique-angle sputtered galium-doped zinc oxide (GZO) thin films was carried out. Both the oblique-angle sputtering and the substrate temperature lowered the resistivity of GZO thin films down to 4 × 10 −3 Ωcm together with an increase of their optical transmittance over 90%.