Compliant Mechanisms for Ultra-Precise Applications

This paper reports about enhanced compliant mechanisms with flexure hinge based on new analytic and/or FEM models that have been manufactured by state of the art wire EDM technology. Experimental proofs at test benches, equipped with ultra-precise interferometer based length and angular measurement systems, show first time the residual deviation to the intended path of motion with a resolution of nanometers/arc seconds. Theoretically determined and measured data are in good correlation. Repeatability limitations are rather more given by the residual noise of the overall test arrangement and mainly not by the mechanism itself.