Old Web
English
Sign In
Acemap
>
Paper
>
Electrical Characteristics of Silicon Devices after UV-Excited Dry Cleaning (Special Issue on Opto-Electronics and LSI)
Electrical Characteristics of Silicon Devices after UV-Excited Dry Cleaning (Special Issue on Opto-Electronics and LSI)
1993
Yasuhisa Sato
Rinshi Sugino
Masaki Okuno
Toshiro Nakanishi
Takashi Ito
Keywords:
Electronic engineering
Engineering
Excited state
Optoelectronics
Silicon
dry cleaning
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]