Pink‐Beam, Highly‐Accurate Compact Water Cooled Slits

Advanced Design Consulting, Inc. (ADC) has designed accurate compact slits for applications where high precision is required. The system consists of vertical and horizontal slit mechanisms, a vacuum vessel which houses them, water cooling lines with vacuum guards connected to the individual blades, stepper motors with linear encoders, limit (home position) switches and electrical connections including internal wiring for a drain current measurement system. The total slit size is adjustable from 0 to 15 mm both vertically and horizontally. Each of the four blades are individually controlled and motorized. In this paper, a summary of the design and Finite Element Analysis of the system are presented.