Ald-coating machine
2012
There is provided an ALD coating system. ALD coating system (100) - a reservoir (1) for a metal-organic starting material (6), and - a device (2) comprising a control valve (3), a pressure gauge (4), a pressure diaphragm (5) and a first multi-way valve (10), wherein - the device (2) is arranged downstream of the reservoir (1), and - the first multi-way valve (10) between a process chamber (7) and a collecting chamber (8) is switchable.
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