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Screening of High-k Layers in MIS and MIM Capacitors Using Aqueous Chemical Solution Deposition
Screening of High-k Layers in MIS and MIM Capacitors Using Aqueous Chemical Solution Deposition
2007
Sven Van Elshocht
An Hardy
Christoph Adelmann
Matty Caymax
Thierry Conard
Alexis Franquet
Olivier Richard
Marlies K. Van Bael
Jules Mullens
Stefan De Gendt
Keywords:
High-κ dielectric
Capacitor
Inorganic chemistry
Materials science
Aqueous solution
Chromatography
chemical solution deposition
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