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VO n Complexes in RTA Treated Czochralski Silicon Wafers Investigated by FTIR Spectroscopy
VO n Complexes in RTA Treated Czochralski Silicon Wafers Investigated by FTIR Spectroscopy
2018
Dawid Kot
Gudrun Kissinger
Jaroslaw Dabrowski
Andreas Sattler
Keywords:
Wafer
Analytical chemistry
Fourier transform infrared spectroscopy
Materials science
Nuclear chemistry
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