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Pad Scratching in Chemical-Mechanical Polishing: The Effects of Mechanical and Tribological Properties
Pad Scratching in Chemical-Mechanical Polishing: The Effects of Mechanical and Tribological Properties
2014
Sanha Kim
Nannaji Saka
Jung-Hoon Chun
Keywords:
Tribology
Composite material
Chemical-mechanical planarization
Chemistry
Inorganic chemistry
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