Monte Carlo simulations on particle transmission characteristics of BN ion barrier films

The simulation calculation and analysis on the electron transmittance and ion stopping power for ion barrier films (IBFs) of BN were performed by Monte Carlo methods. The interaction model between particles and solids were described. We find the Dead Voltage of BN IBFs is 220V. When the energy of the incident ions is 0.2~0.3KeV, 91%—99% of C + , N + and O + are stopped by BN IBFs; while 12%—19% of H + for BN IBF. The results indicate that BN is an idea candidate for ion barrier films. This work provided a theory support for fabricating high performance low-level-light device.