Spiral electrode d33 mode piezoelectric diaphragm combined with proof mass as energy harvester

The paper demonstrates an energy harvester using a freestanding piezoelectric diaphragm combined with a proof mass. The diaphragm bearing double-sided spiral electrodes makes use of the d33 piezoelectric effect to realize energy scavenging. The harvester was fabricated by using a MEMS technique. The energy converting performance of the diaphragm was characterized by a shaker system. Proof masses were combined at the center of the diaphragm to tune the resonance of the harvester for the sake of scavenging low frequency vibrational energy. A receptance model was built to explain the vibrational behavior of the combined system. The resonance tuning and energy harvesting performance of the combination system was experimentally verified.