A monolithic MEMS michelson interferometer for ftir spectroscopy

We report acquiring spectral data in the 8–12 micron wavelength region from a monolithic surface-micromachined MEMS Michelson interferometer for Fourier Transform Infrared (FTIR) spectroscopy. The MEMS Michelson interferometer self-aligns and enables the development of miniaturized FTIR spectrometers, such as ChemPen™, a next-generation universal chemical point sensor that detects, identifies, and quantifies chemicals in the ambient environment. The performance of the Michelson interferometer, including its spectral resolution and operational spectral range, was examined using a widely tunable, monochromatic infrared laser source. The successful fabrication of the millimeter-scale monolithic MEMS Michelson interferometer with sufficient spectral resolution opens a new, revolutionary pathway to a highly sensitive, low cost miniaturized FTIR spectrometer.