High resolution K X-ray spectra of selected silicates induced by MeV proton and carbon micro-beams

Abstract Recently we developed a high resolution wavelength dispersive X-ray spectrometer based on the flat diffraction crystals for use with focused ion beams and used it to study chemical effects in ion beam induced Si K X-ray spectra of silicon and its selected binary compounds. In this work we extended the study to selected silicates. We measured high resolution Si Kα and Kβ X-ray spectra of three silicates: feldspar, kyanite and tourmaline. The spectra have been measured with 2 MeV protons (Kα and Kβ regions) and 20 MeV carbon ions (only Kα region). The results obtained for peak relative intensities were analysed and compared with the related relative intensities obtained from Si, SiC and SiO 2 .