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61.3: Sapphire-based Capacitive Pressure Sensor For High Temperature and Harsh Environment Application
61.3: Sapphire-based Capacitive Pressure Sensor For High Temperature and Harsh Environment Application
2002
M. Soeda
Teruo Kataoka
Y. Ishikura
Shigetomo Kimura
Takatsugu Masuda
Yutaka Yoshikawa
M. Nagata
Keywords:
Electronic engineering
Pressure sensor
Engineering
Capacitive sensing
Sapphire
Correction
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