InfluenceofMechanical Finishingon Secondary Electron Emission ofAlumina Ceramics

Secondaryelectronemission(SEE) coefficients ofalumina ceramics withthree different surface finishes havebeenmeasuredusinga scanning electron microscope witha single-pulse electron beam(100pA,1ms).SEEcoefficients of those aluminas withannealing process becamelower after mechanical grinding operations eventhough its averageroughness was almostsameasthoseof as-sintered ones.SEEcoefficients ofmirror-finished sampleswerethesmallest among thesamples. ChangesofSEEcoefficient withincident angleof primary electrons forsmoothandroughsurfaces are alsodiscussed.