Thermal stability of nanocomposite Mo 2 BC hard coatings deposited by magnetron sputtering

Abstract The investigation of hard coatings under thermal load is crucial in order to obtain information on the thermal stability and possible changes of microstructure and mechanical properties. In addition, advanced heating studies may also provide feedback for the grain growth mechanism occurring during annealing and thus, help to predict optimum post-growth annealing conditions for producing high-performance hard coatings. Here, we investigate the thermal response of Mo 2 BC, deposited by bipolar pulsed direct current magnetron sputtering in an industrial chamber on a silicon substrate at a substrate temperature of 380 °C. Ex-situ and in-situ X-ray diffraction and transmission electron microscopy studies are performed at elevated temperatures to track changes in the structure. Whereas the as-deposited nanocomposite coating exhibits small spherical nanocrystals (1.2 nm in diameter) embedded in an amorphous matrix, a fully crystalline structure, mainly consisting of elongated and interconnected crystals with lengths of up to 1 μm, is obtained at elevated annealing temperatures. Hardness and Young's modulus increase by ~8% and ~47%, respectively, compared to the as-deposited coating. Delamination from the silicon substrate only occurs at temperatures above 840 °C. Thus, our detailed study of the micro- and nanostructure evolution upon thermal annealing suggests that heat treatments below 840 °C are a suitable method to improve the crystallinity and mechanical properties of nanocomposite Mo 2 BC coatings.