The impact of cathode surface roughness and multiple breakdown events on microscale gas breakdown at atmospheric pressure

Gas breakdown is typically driven by Townsend avalanche and predicted mathematically by Paschen’s law (PL). Gas breakdown deviates from PL at microscale due to field emission, which depends critically on electrode condition; however, understanding of the impact of initial electrode surface roughness and multiple breakdown events on breakdown voltage is incomplete. This paper assesses the variation of breakdown voltage for a pin-to-plate electrode setup in air at atmospheric pressure for gap distances of 1 ± 0.5 μm, 5 ± 0.5 μm, and 10 ± 0.5 μm with different surface roughnesses. Breakdown voltage generally increases with increasing gap distance and decreasing surface roughness for a single breakdown event; however, the breakdown voltage after ten breakdown events does not depend on initial gap distance. Atomic force microscopy and optical microscopy show that multiple discharges create circular craters on the flat cathode up to 40 μm deep, with more pronounced craters created at smaller gap sizes and greater cathode surface roughness. The resulting effective gap distances (deff, the sum of cathode placement distance and crater depth) for subsequent breakdown events are similar to those of the initially larger gap distances. Moreover, deff becomes sufficiently large to exceed the Meek criterion for streamer formation, indicating a potential for breakdown mechanisms to change from field emission to Townsend avalanche to streamer formation for a single electrode separation distance. The resulting impact of this change in the breakdown mechanism could have significant implications for ensuring consistent microdevice operation.Gas breakdown is typically driven by Townsend avalanche and predicted mathematically by Paschen’s law (PL). Gas breakdown deviates from PL at microscale due to field emission, which depends critically on electrode condition; however, understanding of the impact of initial electrode surface roughness and multiple breakdown events on breakdown voltage is incomplete. This paper assesses the variation of breakdown voltage for a pin-to-plate electrode setup in air at atmospheric pressure for gap distances of 1 ± 0.5 μm, 5 ± 0.5 μm, and 10 ± 0.5 μm with different surface roughnesses. Breakdown voltage generally increases with increasing gap distance and decreasing surface roughness for a single breakdown event; however, the breakdown voltage after ten breakdown events does not depend on initial gap distance. Atomic force microscopy and optical microscopy show that multiple discharges create circular craters on the flat cathode up to 40 μm deep, with more pronounced craters created at smaller gap sizes and great...