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Etch Features Revealed on Si(100) by Wet Chemical Etching with Solutions Containing Potassium Ions
Etch Features Revealed on Si(100) by Wet Chemical Etching with Solutions Containing Potassium Ions
2009
Jochen Mähliss
Heide Höynck
Alexandra Abbadie
Francois Brunier
Rolf Merz
Alexander Brodyanski
Bernd O. Kolbesen
Keywords:
Dry etching
Reactive-ion etching
Isotropic etching
Potassium
Ion
Inorganic chemistry
Chemistry
potassium ions
Correction
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