Process chamber for a chemical reaction process and coating process for coating an optical object by means of a chemical reaction coating process

2013 
The invention relates to a process chamber (10) for a chemical reaction coating process for coating at least one object to be coated optical (22). The process chamber (10) in this case comprises a chamber wall (18) which includes at least a process chamber (16) in part at least one passage opening (26; 34) to at least one precursor (28a; 28b) and / or a purge gas (29) perform, through the through-opening (34 26). Furthermore, the process chamber (10) at least a first process chamber member (12; 14), which provides a first part of the chamber wall (18) The first process chamber member (12; 14) is designed such that the at least one to be coated optical object (22 ) in such a way on at least one first process chamber member (12; 14) can be arranged that the at least one optical object (22) itself forms a second part of the chamber wall (18).
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