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Co Liner Impact on Microstructure of Cu Interconnects
Co Liner Impact on Microstructure of Cu Interconnects
2015
Xunyuan Zhang
Linjun Cao
Vivian W. Ryan
Paul S. Ho
Bill Taylor
Christian Witt
Cathy Labelle
Keywords:
Microstructure
Chemistry
Inorganic chemistry
Metallurgy
Correction
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