Prostate cancer biomarker detection by using Si nanowire based electrolyte/NiO x /SiO 2 /n-Si sensors

Sarcosine as a prostate cancer biomarker has been detected by using Si naowire based electrolyte/NiO x /SiO 2 /n-Si sensor for the first time. A long nanowire (14 ^m) by chemically etched is observed by scanning electron microscope (SEM) images. A 2 nm-thick NiO x membrane on SiO 2 /n-Si structure shows low concentration of 1 pM H 2 O 2 sensing as well as sarcosine of 10 pM has been detected because Ni 2 + oxidation state changes to Ni 3 + state.