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Visualization of Local Gate Depletion in PMOSFETs Using Unique Backside Etching and Selective Etching Technique
Visualization of Local Gate Depletion in PMOSFETs Using Unique Backside Etching and Selective Etching Technique
1999
Akio Nishida
Tomoko Sekiguchi
Toshiaki Yamanaka
Renichi Yamada
Kuniyasu Nakamura
Satoshi Tomimatsu
Kaoru Hitachinaka-shi Umemura
Hiroshi Kakibayashi
Yasuko Yoshida
Kohta Funayama
Shuji Ikeda
Keywords:
Optoelectronics
Visualization
Materials science
Etching
Correction
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