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FABRICATION APPROACHES TO 3D SUPERCONDUCTING QUBIT RESONATORS WITH A HIGH Q-FACTOR
FABRICATION APPROACHES TO 3D SUPERCONDUCTING QUBIT RESONATORS WITH A HIGH Q-FACTOR
2021
Paul Carriere
Sergey V. Kutsaev
Ronald Agustsson
Andrew Cleland
Pedro Frigola
Timothy Horn
Michael J. Kelly
Alexander Smirnov
Keywords:
Fabrication
Q factor
Resonator
Qubit
Physics
Superconductivity
Optoelectronics
Correction
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