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HfCp(NMe2)3とO2プラズマを用いたHfO2の原子層堆積法
HfCp(NMe2)3とO2プラズマを用いたHfO2の原子層堆積法
2017
Sharma Akhil
Longo Valentino
A Verheijen Marcel
A Bol Ageeth
W. M. M. Kessels
Keywords:
Inorganic chemistry
Chemistry
Computational chemistry
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