A Traveling Wave Type of Piezoelectric Ultrasonic Bidirectional Linear Microactuator

A piezoelectric ultrasonic microactuator is presented, with a cylindrical stator and slider structure. The length and diameter of the microactuator are about 10 and 1.5 mm, respectively. The stator consists of two piezoelectric ceramic (PZT) tubes connected by a thin film metallic glass (TFMG) pipe, which is fabricated using the rotating magnetron sputtering technique. Traveling wave propagation is generated on the TFMG pipe in finite element method (FEM) simulations and also observed in the measurement. Bi-directional motion of the slider was observed around 600 kHz, and the maximum velocity was about 40 mm/s at 25 V.