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Characterization of Ga-doped ZnO thin films prepared by RF magnetron sputtering method
Characterization of Ga-doped ZnO thin films prepared by RF magnetron sputtering method
2021
Young Hoon Yun
Keywords:
Thin film
Electrical resistance and conductance
Sputter deposition
Materials science
characterization
Optoelectronics
Doping
Correction
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