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A Cu interconnect process for the 130 nm process technology node
A Cu interconnect process for the 130 nm process technology node
2001
Peter K. Moon
C. Allen
Nidhi Anand
D. Austin
T. Bramblett
M. Fradkin
S. Fu
Makarem A. Hussein
J. Jeong
C. Lo
A. Ott
P. Smith
L. Rumaner
Keywords:
Interconnection
Electronic engineering
Materials science
Optoelectronics
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