Anti-Corrosion Property of Atomic Layer Deposition Films for Anodized Aluminum

Single and multilayer of Al2O3 and TiO2 were fabricated on anodized aluminum by atomic layer deposition. The effect of processing parameters on pore sealing and anti-corrosion property was studied. It is concluded that the micropores on anodized aluminum could be sealed by atomic layer deposition oxide films through SEM and staining experiments. The anti-corrosive property is affected mainly by the film thickness and process temperature. The acidic drip and salt spray test shows that the anti-corrosion property is enhanced as the film thickness increase. With the similar thickness, Al2O3/TiO2 multilayer film has the best anti-corrosion property, while the single Al2O3 layer appears the poorest. The complementary roles between two basic materials result in the enhanced application property.