Automatic dextrous handling of micro components using a 6 DOF microgripper

This paper presents an automatic dextrous handling and inspection system for optoelectronics components using a novel 6 DOF microgripper. The control system includes three hierarchical layers: actuator control layer, motion planning layer, and mission layer. Visual servoing is applied in automatic manipulation. The performance of the system is demonstrated in a machine vision based automatic inspection task for 300 /spl times/ 300 /spl times/ 100 /spl mu/m optoelectronics components.