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Back-end of line compatible transistors for hybrid CMOS applications
Back-end of line compatible transistors for hybrid CMOS applications
2019
Po-Tsun Liu
Po-Yi Kuo
Chien-Min Chang
Hsiu-Hsuan Wei
Shih-Tse Wu
Eric Sun
Keywords:
CMOS
Computer science
Back end of line
Optoelectronics
Transistor
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