Dual-wavelength laser annealing device and method thereof

The invention relates to a dual-wavelength laser annealing device and a method thereof. The dual-wavelength laser annealing device comprises a green laser device and an infrared laser device; an output optical path of the green laser device is sequentially provided with a beam expanding module, a green light bar-type spot reshaping module, and a green light 45-degree reflector; an output optical path of the infrared laser device is sequentially provided with an infrared bar-type spot reshaping module, and an infrared 45-degree reflector; output optical paths of the green light 45-degree reflector and the infrared 45-degree reflector are provided with a beam combining projection focus lens; an output optical path of the beam combining projection focus lens is provided with a variable diaphragm; and an output end of the variable diaphragm is directly opposite to a machining platform. Two laser beams are combined into one beam via the optical assembly; the combined laser beam is converted from a circular Gaussian distribution into a bar-type Gaussian distribution after being coordinated, adjusted and converted among optical elements; the laser is a bar-type light spot after the beam combination; the introduction of the infrared wavelength provides a deeper annealing depth for the light spot, makes the temperature rise at the moment that the laser contacts with the surface of material, thereby increasing the activation rate of implanted ions; and therefore the machining effect is better.