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Development of a wide variety of half-inch wafers that can be used in Minimal Fab
Development of a wide variety of half-inch wafers that can be used in Minimal Fab
2021
Kazumasa Nemoto
Hiroyuki Tanaka
Takaaki Sakai
Atsushi Kajikura
Zhen Yang
Sommawan Khumpuang
Shiro Hara
Keywords:
Materials science
Optoelectronics
Wafer
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