Recovering low-turbidity cutting liquid from silicon slurry waste

Abstract In order to recover a low-turbidity polyalkylene glycol (PAG) liquid from silicon slurry waste by sedimentation, temperatures were adjusted, and acetone, ethanol or water was used as a diluent. The experimental results show that the particles in the waste would aggregate and settle readily by using water as a diluent. This is because particle surfaces had lower surface potential value and weaker steric stabilization in PAG–water than in PAG–ethanol or PAG–acetone solutions. Therefore, water is the suggested diluent for recovering a low-turbidity PAG (