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Hyperdoping of Si by metal impurities upon ion irradiation
Hyperdoping of Si by metal impurities upon ion irradiation
2019
R. M. Bayazitov
R. I. Batalov
I. A. Faizrakhmanov
A. I. Gumarov
Keywords:
Ion implantation
Inorganic chemistry
Materials science
Electrical resistivity and conductivity
Irradiation
Transmission electron microscopy
Current density
Ion
Silicon
Semimetal
Correction
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