High-power module based on inert gas–halogen mixtures for UV irradiation

We have developed a module based on exciplex barrier-discharge lamps for irradiation by high-power narrow-band ultraviolet radiation. The module uses air cooling and is intended for irradiation of substrates such as those used in microelectronics. The module provides close to uniform irradiation on a flat surface with power density up to 35 and 25 mW/cm as a result of emission in B–X bands of the molecules XeBr (282 nm) and XeCl (308 nm) respectively.