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Material Design and Development for Aqueous Base Compatible High-Performance Deep UV Negative-Tone Resists
Material Design and Development for Aqueous Base Compatible High-Performance Deep UV Negative-Tone Resists
1998
Pushkara Rao Varanasi
Hiroshi Ito
Phil Brock
Gregory Breyta
William R. Brunsvold
Ahmad D. Katnani
Keywords:
Composite material
Aqueous solution
Resist
Materials science
Optoelectronics
Material Design
Compatibility (mechanics)
Correction
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