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Interest of synchronized pulsed plasmas for next CMOS technologies
Interest of synchronized pulsed plasmas for next CMOS technologies
2011
O. Joubert
Maxime Darnon
Gilles Cunge
E. Pargon
Laurent Vallier
Nader Sadeghi
Thibaut David
M. Haass
P. Bodart
Camille Petit-Etienne
Samer Banna
Thorsten Lill
Keywords:
Optoelectronics
Plasma
CMOS
Physics
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