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Comparative study of spin coated and sputtered PMMA as an etch mask for silicon micromachining
Comparative study of spin coated and sputtered PMMA as an etch mask for silicon micromachining
2001
Dhananjay Bodas
R.V. Dabhade
Sheetal J. Patil
S. A. Gangal
Keywords:
Analytical chemistry
Surface micromachining
Inorganic chemistry
Spin-½
Chemistry
Silicon
Correction
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