Characterization of PZT thin films prepared by a modified sol–gel method

Abstract Lead zirconate titanate (PZT) thin films with thicknesses of around 5 μm were prepared by the deposition a sol slurry. This sol slurry consists of a PZT-sol on acetic acid basis and PZT powder. The sol serves as the dispersion agent of the powder. Both are identical in composition with molar ratio Zr/Ti of 0·53/0·47. Lead in excess of 5% was used in all samples. This coating conditions enhance the possibilities of film preparation.