6 GHz Lithium Niobate MEMS Resonator with Square Spiral Electrodes

Due to the increasing demand of higher frequencies for RF front end technologies, mainly for 5G smartphones, there is a need to develop filters for higher frequencies and large bandwidths. One of the promising candidates for satisfying those demands is the recently emerged laterally-excited bulk acoustic wave resonators. In this study, we aim to realize a resonator operating at 6 GHz based on the first-order antisymmetric (A1) mode utilizing Z-cut LiNbO3 thin films and square spiral electrodes.